This book contains the articles collected for the Special Issue entitled Micro-nanoSurface Functionalization of Materials and Thin Films for Optical Applications in thejournal Coatings (ISSN 2079-6412). These selected articles provide a meaningful overviewof recent advances and concepts beyond the state-of-the-art regarding surfacefunctionalization of materials and deposition of thin films to be used in opticalapplications. The aim was to cover all relevant aspects of the topic (simulation, design,fabrication, characterization and applications) with a special emphasis on nonconventionalmethods for surface modification of materials, combinations of maturefabrication routes with emerging technologies (i.e., additive manufacturing) and largeareafabrication concepts to pave the way to an industrial utilization of the developedmaterials. This overview comprises the recent work of reputed scientists from Germany,Austria, Spain and India on:- New developments on the scale-up deposition of transparent conductive materials bymagnetron sputtering,- Design of hierarchical surface structures at different scale lengths for nanoimprinting ofoptical nano- and micro-structures,- Non-conventional preparation of rutile-type TiO2 films at room temperature for opticalapplications on heat-sensitive substrates,- Design of spectrally selective solar absorber coatings based on computationalsimulation and ellipsometry measurements.